Patent · US Active

Stage apparatus

US8624445B2 · kind B2 · utility

0Cited by

11References

19Claims

0Family size

Assignee

KABUSHIKI KAISHA YASKAWA DENKI · JP

Inventors

Youichi Motomura · Fukuoka, JP
Toshiyuki Kono
Yoshiaki Kubota · Tokyo, JP

Key dates

Filing date	Aug 29, 2012
Grant date	Jan 7, 2014
Priority date	—
Expiry date	Aug 29, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70816
WIPO fieldOptics
WIPO sectorInstruments

Abstract

This stage apparatus includes a movable table to hold a sample, a levitation unit to operate the movable table at least in a vertical direction, and a linear motor to operate the movable table in a first horizontal direction in a horizontal plane, including a linear motor movable element arranged inside the movable table and a linear motor stator arranged inside the movable table.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.