Measuring method, arrangement and software product
US8624582B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2006 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Nov 6, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/1719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.