Broadband reflective waveguide metal gratings and their formation
US8625941B1 · kind B1 · utility
149Cited by
24References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 2010 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | May 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/14
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Devices having reflective grating structures and methods of fabricating the same are disclosed. A bottom clad layer is disposed above a substrate. A waveguide core layer is disposed above the bottom clad layer. A top clad layer is disposed above the waveguide core layer. At least one metal grating structure is disposed adjacent to an interface between the waveguide core layer and one of the bottom clad layer and the top clad layer, where the at least one metal grating structure is configured to reflect at least a portion of an incident electromagnetic radiation coupled into the waveguide core layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.