Patent · US Active

Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam

US8627511B2 · kind B2 · utility

2Cited by
5References
13Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 27, 2011
Grant dateJan 7, 2014
Priority date
Expiry dateJan 27, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q30/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.