Micromechanical component, optical device, manufacturing method for a micromechanical component, and manufacturing method for an optical device

US8630050B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Reinhold Fiess · Durbach, DE
• Ingo Ramsteiner · Leonberg, DE
• Ulrich Kallmann · Lörrach, DE

Key dates

• Filing date: Jan 11, 2011
• Grant date: Jan 14, 2014
• Expiry date: Oct 23, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24802
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical component is described having a component which has a moth-eye structure which covers at least a partial surface of the component. At least a portion of the partial surface, as a first contact surface, may contact a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. Alternatively or additionally, at least a portion of the partial surface may be at least one partial area of an outer side and/or of an exposed inner side, facing the inner space, of the component configured as a light window. Also described is an optical device having such a micromechanical component, a manufacturing method for a micromechanical component, and a manufacturing method for an optical device.