System and method for supporting discovery of defect included in inspection subject
US8630476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2011 |
| Grant date | Jan 14, 2014 |
| Priority date | — |
| Expiry date | Apr 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, and methods of operation thereof, is presented that permits determination of a defect in an inspection subject by means of processing an image of said inspection subject, which system avoids exhaustion of bandwidth in a communication line connected to the image processing unit. The system includes a unit to receive an image, a transmission queue and a buffer to store the image, an image processing unit to determine whether the image includes a defect image, a unit that generates defect information when the presence of a defect image is determined, an image extraction unit that extracts the defect image based on the defect information, and a storage unit for storing such defect image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.