Helium sensor

US8633704B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Werner Grosse Bley · Bonn, DE
• Daniel Wetzig · Cologne, DE

Key dates

• Filing date: Feb 25, 2009
• Grant date: Jan 21, 2014
• Expiry date: Apr 21, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J41/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.