Method of fabricating a compliant membrane probe
US8640324B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2009 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Dec 4, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for fabricating a compliant membrane probe for communication with an integrated circuit includes installing an array of conductive structures within a flexible membrane, the conductors comprising a beam structure having a first end and a second end, with each one of the conductors further comprising a probe tip extending from the first end, the probe tip having a throat generally surrounded by material of the flexible membrane and a head at an end of the throat such that the head is disposed at an opposite side of the flexible membrane with respect to the beam structure; and configuring the second end of the beam structure so as to be supported by a first end of the beam structure of an adjacent conductor thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.