MEMS mass-spring-damper systems using an out-of-plane suspension scheme
US8640541B2 · kind B2 · utility
18Cited by
77References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2010 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Apr 1, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/082
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.