Pressure sensor with a flexible membrane
US8640547B2 · kind B2 · utility
6Cited by
9References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2009 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Mar 2, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04B47/066
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a pressure sensor (6). This pressure sensor (6) comprises a flexible membrane (11) cooperating with a transmission device (10) that enables a value representing the pressure to be supplied on the basis of the deformation of the membrane (11). The membrane (11) is made from an at least partially amorphous material in order to optimise the dimensions of the sensor (6).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.