Patent · US Active

Integration of ZnO nanowires with nanocrystalline diamond fibers

US8642123B1 · kind B1 · utility

2Cited by
4References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 14, 2010
Grant dateFeb 4, 2014
Priority date
Expiry dateJul 23, 2030

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01P2004/64
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Provided herein is a method for the synthesis and the integration of ZnO nanowires and nanocrystalline diamond as a novel hybrid material useful in next generation MEMS/NEMS devices. As diamond can provide a highly stable surface for applications in the harsh environments, realization of such hybrid structures may prove to be very fruitful. The ZnO nanowires on NCD were synthesized by thermal evaporation technique.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.