Integration of ZnO nanowires with nanocrystalline diamond fibers
US8642123B1 · kind B1 · utility
2Cited by
4References
17Claims
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Key dates
| Filing date | May 14, 2010 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Jul 23, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Provided herein is a method for the synthesis and the integration of ZnO nanowires and nanocrystalline diamond as a novel hybrid material useful in next generation MEMS/NEMS devices. As diamond can provide a highly stable surface for applications in the harsh environments, realization of such hybrid structures may prove to be very fruitful. The ZnO nanowires on NCD were synthesized by thermal evaporation technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.