Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases
US8642917B2 · kind B2 · utility
0Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2012 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Apr 3, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/3436
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cathode electrode for plasma generation. The cathode is made of graphite with highly ordered structure such as Pyrolitic Graphite or Carbon-Carbon composites. Furthermore, carbon containing gases will be used as plasma gas. The cathode will allow for theoretically an unlimited lifetime of the cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.