MEMS device
US8643129B2 · kind B2 · utility
23Cited by
2References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2007 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Aug 19, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/733
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro-electrical-mechanical device comprises: a transducer arrangement having at least a membrane being mounted with respect to a substrate; and electrical interface means for relating electrical signals to movement of the membrane; in which the transducer arrangement comprises stress alleviating formations which at least partially decouple the membrane from expansion or contraction of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.