X-ray generating apparatus and inspection apparatus using the same therein
US8644451B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Mar 26, 2010 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Aug 22, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/086
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.