Plasma booster for plasma treatment installation
US8646409B2 · kind B2 · utility
0Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2012 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Oct 10, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32018
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Vacuum treatment installation particularly for plasma coating workpieces has an arrangement for boosting and/or igniting a glow discharge plasma for the treatment of workpieces, and at least one hollow body of electrically conductive material, the hollow body including a hollow space and at least one entrance opening through which charge carriers flow in order to make possible ignition and operation of a plasma or to boost an existing plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.