Apparatus, tool and methods for depositing annular or circular wedge coatings
US8647437B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2010 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Apr 12, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/044
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for depositing annular or circular wedge coatings with arbitrary dependence of thickness versus position includes a coating tool in which at least one substrate is disposed in a line of sight arrangement vs. least one deposition source, each substrate having an axis of symmetry and associated with a single mask having an aperture and positioned between the substrate and the least one deposition source, the mask and the substrate arranged to perform a relative rotation around a common axis to follow a law of motion which results in the deposition of a coating with a desired law of variation of thickness vs. position on the circumference of the substrate. The relative rotation is imparted by a motor. In embodiments in which there are a plurality of substrates and associated single masks, the substrates are positioned on a planet carrier independently rotatable by another motor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.