Patent · US Active

Two component etching

US8647526B2 · kind B2 · utility

0Cited by

5References

21Claims

0Family size

Assignee

Merck Patent GmbH · DE

Inventors

Oliver Doll · Dietzenbach, DE
Edward Plummer · Toledo, US
Mark James · Romsey, GB
Ingo Koehler · Darmstadt, DE

Key dates

Filing date	May 12, 2010
Grant date	Feb 11, 2014
Priority date	—
Expiry date	Jul 19, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldBasic materials chemistry
WIPO sectorChemistry

Abstract

The object of the present invention is a new inkjet printable etching composition comprising an etchant, which is activated by a second component. Thus, a further object is the use of this new composition in a process for the etching of surfaces semiconductor devices or surfaces of solar cell devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.