Nucleation of ultrathin, continuous, conformal metal films using atomic layer deposition and application as fuel cell catalysts
US8647723B2 · kind B2 · utility
2Cited by
1References
17Claims
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Key dates
| Filing date | Sep 28, 2011 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Nov 4, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method to achieve a conformal ultrathin film of platinum or one of its alloys on a substrate that can be economically used as a heterogeneous catalyst, such as automotive polymer electrolyte membrane (PEM) fuel cell catalyst. The method includes using a hydrogen plasma in platinum atomic layer deposition along with tungsten as a substrate or anchoring adhesive layer to assist platinum nucleation and deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.