Stabilization of silsesquioxane resins
US8648125B2 · kind B2 · utility
0Cited by
9References
4Claims
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Key dates
| Filing date | Dec 2, 2010 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Dec 2, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G77/80
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Disclosed is silsesquioxane resin composition that contains a free radical curable functional group that is stabilized with a hydrophilic inhibitor. The hydrophilic inhibitor that has the capability to scavenge free radicals such as ascorbic acid or salicylic acid is used to stabilize the resin. The resins are useful in semiconductor formation such as for anti-reflective coatings, hardmasks or photoresist layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.