Quadrature compensation for a rotation-rate sensor

US8650954B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Joerg Hauer · Reutlingen, DE
• Christoph Gauger · Balingen, DE

Key dates

• Filing date: Nov 23, 2009
• Grant date: Feb 18, 2014
• Expiry date: Aug 31, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation-rate sensor includes a substrate having a surface, a movable element situated above the surface, which is deflectable based on a Coriolis force along a first axis that runs perpendicular to the surface, a driving device which is prepared to activate the movable element along a second axis that runs parallel to the surface, a compensation device, in order to generate an electrostatic force along the first axis, including electrodes corresponding to one another, developed on the substrate and on the movable element; a relative degree of covering of the electrodes in the direction of the first axis being a function of the deflection of the movable element along the second axis; and the electrode developed on the movable element runs around an insulating region of the movable element.