Interference measurement apparatus and method for measuring interference
US8654343B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2010 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | May 29, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2222/31
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An embodiment of the present invention realizes an interference measurement apparatus which can obtain an interference image to be used for obtaining three-dimensional information of a subject which dynamically changes. An interference measurement apparatus of the present invention, which captures an interference image formed by the reference light beam and the object light beam which has reached the image-capturing element via a subject, the interference measurement apparatus includes: a laser light source; a beam splitter which splits a laser beam into a reference light beam and an object light beam; and an image-capturing element; a polarization splitting section which splits the object light beam into two types of object light beams which are different in polarization direction so that an angular difference is caused between respective propagation directions of the two types of object light beams; and a polarizer array device which allows (i) the reference light beam and (ii) the two types of object light beams which have reached the polarizer array device via the subject to pass through the polarizer array device (30), the polarizer array device in which a plurality of first p…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.