Method, phase grating and device for analyzing a wave surface of a light beam
US8654348B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2009 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | Dec 24, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/0215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The application relates to a method for analyzing the wave surface of a light beam from a source to the focus of a lens. The beam illuminates a sample on the analysis plane and having a defect. A diffraction grating of the plane is a conjugate of an analysis plane through a focal system. An image is formed in a plane at a distance from the grating plane and analyzed by processing means. The invention encodes this grating by a phase function resulting from the multiplication of two phase functions, a first exclusion function defining a meshing of useful zones transmitting the beam to be analyzed in the form of light pencil beams, and a second phase fundamental function which creates a phase opposition between two light pencil beams coming out of adjacent meshes of the exclusion grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.