Apparatus and method for balancing combined RF power-supplies for driving a CO2 gas-discharge laser
US8654805B2 · kind B2 · utility
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6References
20Claims
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Key dates
| Filing date | Aug 23, 2011 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | May 8, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F2203/7227
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Radio-frequency (RF) power supply apparatus for supplying RF power to discharge electrodes of a gas-discharge laser includes a plurality of amplifier modules each having an RF output. A power combining arrangement is provided for combining the amplifier module RF-outputs into a single combined RF-output connected to the discharge electrodes. A DC power supply is connectable to or disconnectable from each of the transistor amplifier modules, separately, to allow current drawn by any of the amplifier modules to be monitored by a single current sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.