Electrostatic capacitive pressure sensor
US8656787B2 · kind B2 · utility
6Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2010 |
| Grant date | Feb 25, 2014 |
| Priority date | — |
| Expiry date | Feb 3, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.