Microelectromechanical gyroscopes and related apparatus and methods
US8661899B2 · kind B2 · utility
3Cited by
6References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2011 |
| Grant date | Mar 4, 2014 |
| Priority date | — |
| Expiry date | Oct 13, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.