Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
US8664863B2 · kind B2 · utility
1Cited by
10References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 8, 2009 |
| Grant date | Mar 4, 2014 |
| Priority date | — |
| Expiry date | Apr 18, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J33/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The power supply device (14) for an ion-bombardment-induced secondary-emission electron source in a low-pressure chamber includes a control input, two high-voltage outputs, an element for generating a plurality of positive pulses on a high-voltage output, and an element for generating a negative pulse on the other high-voltage output after at least some of the positive pulses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.