Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion device
US8665672B2 · kind B2 · utility
37Cited by
5References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 4, 2009 |
| Grant date | Mar 4, 2014 |
| Priority date | — |
| Expiry date | Nov 13, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.