System for preventing contaminants from reaching a gas purifier
US8668768B2 · kind B2 · utility
0Cited by
19References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2012 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Nov 27, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25J2290/62
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.