Apparatus and method for molecule detection using nanopores
US8669124B2 · kind B2 · utility
9Cited by
5References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 12, 2009 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Jun 30, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detector device and method of its fabrication are disclosed. Illustratively, an additional via is present through an insulator layer over a gate channel region which is on top of the channel region. The additional via is filled with conductor material. The conductor material is removed to form a chamber leading to one side of the gate channel region. Furthermore, a nanopore is etched from the chamber through the channel region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.