Apparatus and method for the production of trisilyamine
US8669387B2 · kind B2 · utility
5Cited by
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8Claims
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Key dates
| Filing date | Mar 19, 2013 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Mar 19, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/1943
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is described a process for preparing silylamines in and particularly trisilylamine (TSA) in high yields in a tubular laminar flow, plug flow reactor, from ammonia gas and a monohalosilane gas. The apparatus can be a tubular flow reactor comprising a first portion of the reactor defining a gas entry zone, a second portion of the reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region. Trisilylamine can be recovered in the separation zone in a cold trap collection vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.