Patent · US Active

Scanning incremental focus microscopy

US8669524B2 · kind B2 · utility

0Cited by

10References

22Claims

0Family size

Assignee

The Research Foundation of the State University of New York · US

Inventors

Eric Lifshin · Voorheesville, US
Michael Stessin · Niskayuna, US
Isaak Chagouel · Albany, US

Key dates

Filing date	Oct 25, 2010
Grant date	Mar 11, 2014
Priority date	—
Expiry date	Sep 2, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Method and apparatus are provided for generating an enhanced image of an object. The method includes obtaining images of an area of an object generated using a probe of having a probe size greater than or equal to a minimum probe area size. An enhanced image of the area of the object is generated by accurately computing the emission intensities emitted from pixel areas smaller than the minimum probe size and within the area of the object. This is repeated for other areas of the object to form other enhanced images. The enhanced images are combined to form an accurate enhanced image of the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.