Resonator
US8669822B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 21, 2011 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Jun 21, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.