High speed optical inspection system with camera array and compact, integrated illuminator
US8670031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2010 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Jan 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V10/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection system is provided for inspecting a workpiece including a feature to be inspected. The system includes a workpiece transport configured to transport the workpiece in a nonstop manner. An illuminator is configured to provide a first strobed illumination field type and a second strobed illumination field type. The illuminator includes a light pipe having a first end proximate the feature, and a second end opposite the first end and spaced from the first end. The light pipe also has at least one reflective sidewall. The first end has an exit aperture and the second end has at least one second end aperture to provide a view of the feature therethrough. An array of cameras is configured to digitally image the feature. The array of cameras is configured to generate a first plurality of images of the feature with the first illumination field and a second plurality of images of the feature with the second illumination field. A processing device is operably coupled to the illuminator and the array of cameras, the processing device is configured to store at least some of the first and second plurality of images and provide the first and second pluralities to an other de…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.