Optical interference measuring method and optical interference measuring apparatus
US8670126B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2011 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | May 19, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an optical interference measuring method according to the present invention, light emitted from a light source unit is split into measuring light and reference light, coherent light is detected that is obtained by interference of the reference light and the measuring light reflected from or scattered rearward from a measuring object, an optical-path length adjustment mechanism provided in the optical path of the reference light is driven to change the optical path length of the reference light, it is decided whether an image based on the detected coherent light is a normal image or a folded image based on the coherent light having varied with the change of the optical path length of the reference light, and the measuring object is measured from the detected coherent light based on a result of the decision about whether the image is a normal image or a folded image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.