Pressure sensor having a diaphragm
US8671765B2 · kind B2 · utility
6Cited by
17References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2011 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | Jan 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor comprising: a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a differential pressure gauge provided in the differential pressure diaphragm; a static pressure diaphragm provided at the outer peripheral portion of the differential pressure diaphragm; a first static pressure gauge formed at an edge portion of the static pressure diaphragm; and a second static pressure gauge formed at a center portion of the static pressure diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.