Block copolymer assembly methods and patterns formed thereby
US8673541B2 · kind B2 · utility
14Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2010 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | Oct 29, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24926
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Patterned substrates templates are provided, as well as methods comprising a combination of lithography and self-assembly techniques. The patterned substrates may comprise first and second patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.