Micro viscometer
US8677807B2 · kind B2 · utility
0Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2011 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Oct 31, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N11/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a micro viscometer comprising a substrate having a first chamber and a second chamber that are positioned at intervals; a thin film disposed on the substrate to cover the first chamber and the second chamber; an actuating part that disposed on the thin film corresponding to the first chamber; and a sensing part that disposed on the thin film corresponding to the second chamber, wherein at least one main trench is formed in between the first chamber and the second chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.