Thermal measurements using multiple frequency atomic force microscopy
US8677809B2 · kind B2 · utility
5Cited by
34References
2Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 21, 2010 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | May 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.