Method for fabricating oxide-confined vertical-cavity surface-emitting laser
US8679873B2 · kind B2 · utility
1Cited by
2References
4Claims
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Key dates
| Filing date | Dec 11, 2009 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Apr 11, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18313
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.