Precision driver circuits for micro-electro-mechanical system
US8680894B1 · kind B1 · utility
3Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 6, 2013 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Mar 6, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2310/0264
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
There is disclosed a driver circuits and method for driving a micro-electro-mechanical system. A driver circuit may include a converter to convert a digital input value into a pulse-width modulated signal with precise amplitude. A low pass filter may extract an average DC component of the pulse-width modulated signal. An amplifier may amplify the average DC component to provide an output voltage to drive the MEMS.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.