Patent · US Active

Humidity sensor based on progressive corrosion of exposed material

US8683861B2 · kind B2 · utility

17Cited by

10References

17Claims

0Family size

Assignee

NXP B.V. · NL

Inventors

Aurelie Humbert · Brussels, BE
Youri Victorovitch Ponomarev · Leuven, BE
Matthias Merz · Leuven, BE
Romano Hoofman · Leuven, BE

Key dates

Filing date	Jul 30, 2008
Grant date	Apr 1, 2014
Priority date	—
Expiry date	Aug 11, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01N17/04
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor senses a characteristic of an environment, e.g., humidity. The sensor has a substrate with strips of material that is sensitive to corrosion as a result of the characteristic. The strips are configured to respond differently to the characteristic. By means of repeatedly measuring the resistances of the strips, the environment can be monitored in terms of accumulated exposure to the characteristic. The strips are manufactured in a semiconductor technology so as to generate accurate sensors that behave predictably.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.