Patent · US Active

Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes

US8683863B2 · kind B2 · utility

3Cited by

5References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Johannes Classen · Reutlingen, DE
Burkhard Kuhlmann · Reutlingen, DE
Daniel Christoph Meisel · Pittsburgh, US

Key dates

Filing date	Jan 10, 2011
Grant date	Apr 1, 2014
Priority date	—
Expiry date	Nov 6, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5747
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.