Methods for introduction of a reactive material into a vacuum chamber
US8684650B2 · kind B2 · utility
0Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2011 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Oct 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04F5/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum chamber assembly includes a vacuum chamber containing a reactive material, an inlet fill tube fixedly attached to the vacuum chamber, and an outlet fill tube fixedly attached to the vacuum chamber. The inlet fill tube has a first vacuum tight seal and the outlet fill tube has a second vacuum tight seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.