Patent · US Active

Methods for introduction of a reactive material into a vacuum chamber

US8684650B2 · kind B2 · utility

0Cited by
8References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 26, 2011
Grant dateApr 1, 2014
Priority date
Expiry dateOct 26, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG04F5/14
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A vacuum chamber assembly includes a vacuum chamber containing a reactive material, an inlet fill tube fixedly attached to the vacuum chamber, and an outlet fill tube fixedly attached to the vacuum chamber. The inlet fill tube has a first vacuum tight seal and the outlet fill tube has a second vacuum tight seal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.