Method for producing a microstructure
US8685488B2 · kind B2 · utility
7Cited by
17References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2008 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Dec 10, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
The present invention relates to a method for producing a micropattern on a substrate (22), in which
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.