Bias voltage tuning of MEMS resonator operation point
US8686802B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2012 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | May 25, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03B5/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of configuring a device comprising a MEMS resonator includes initiating operation of the device, estimating a first parameter of the MEMS resonator based on the initiated operation, the first parameter not varying with the bias voltage, monitoring the operation of the device at a plurality of levels of the bias voltage, calculating a second parameter of the MEMS resonator based on the monitored operation, the second parameter varying with the bias voltage, determining an operational level of the bias voltage based on the estimated first parameter and the calculated second parameter, and configuring the device in accordance with the determined operational level of the bias voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.