Monolithically integrated active electronic circuit and waveguide structure for terahertz frequencies
US8686813B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2009 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Nov 22, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic system. The electronic system includes a waveguide structure having a first waveguide-coupling point and a second waveguide-coupling point and an active electronic circuit having a first circuit-coupling point and a second circuit-coupling point. The second waveguide-coupling point is coupled to the first circuit-coupling point; the system is capable of receiving an input signal at the first waveguide-coupling point and transmitting an output signal at the second circuit-coupling point and/or receiving the input signal at the second circuit-coupling point and transmitting the output signal at the first waveguide-coupling point; the input signal and the output signal have frequencies in a terahertz frequency range; and the system is fabricated as a monolithic integrated structure having the waveguide structure fabricated by micromachining and the circuit fabricated monolithically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.