Through silicon imaging and probing
US8687192B2 · kind B2 · utility
1Cited by
1References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2011 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Feb 20, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/21
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Through silicon imaging and probing. A light source provides unpolarized light to be projected on a device under test (DUT). Light reflected from the DUT may be captured by a camera or other image capture device. A pellicle is utilized to reflect light from the light source toward the DUT. The pellicle also passes light reflected by the DUT to the camera. One or more linear polarizers or half wave plates may be used to provide the desired light polarization. The ability to provide the desired polarization provides an improved image that can be captured by the camera.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.