Transport apparatus, position teaching method, and sensor jig
US8688261B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 2009 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | May 13, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.