High sensitivity mechanical gyro with reduced quadrature error
US8689631B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2011 |
| Grant date | Apr 8, 2014 |
| Priority date | — |
| Expiry date | Jun 26, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gyroscope comprising: a multi-layer substrate, comprising drive spring and sense spring layers; a rigid support structure formed from the substrate; a plurality of drive springs formed in each drive spring layer wherein each drive spring is operatively coupled to the support structure; a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs; a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass with respect to the support structure; a plurality of sense springs formed in each sense spring layer, wherein each sense spring is operatively coupled to the drive mass; and a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.