Concave and convex micromirrors and methods of making the same
US8691100B2 · kind B2 · utility
0Cited by
2References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 9, 2006 |
| Grant date | Apr 8, 2014 |
| Priority date | — |
| Expiry date | Apr 28, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.